Beilstein J. Nanotechnol.2013,4, 453–460, doi:10.3762/bjnano.4.53
dependence on the ion fluence. Simultaneously, helium implantation occurs. Depending on the fluence and primary energy, porous nanostructures or large blisters form on the sample surface. The growth of the helium bubbles responsible for this effect is discussed.
Keywords: formationandhealingofdefectsin
crystals; helium ion microscopy; ion beam/solid interactions; vacancies in crystals; Introduction
The helium ion microscope allows the projection of a He+ beam of several tens of kiloelectronvolts with a diameter of 0.4 nm [1] onto a sample. This makes HIM an attractive tool for surface patterning and
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Figure 1:
HIM SE image of a Au{111} surface, exposed to a He+ beam with a fluence of 8.4 × 1017 cm−2 at diffe...